Planarcore® PVA Brush
Product Details & Documents
Planarcore® PVA Brush is designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications.
- High-Purity PVA
- Molded through the core construction
- Eliminates alignment and gapping problems, increasing system throughput
- Close molded technology
- Reduces downtime on tool
- Decreases defectivity on wafer
The unique molded-through-the-core technology provides absolute adhesion of the PVA to the brush core, unlike standard PVA products that are merely friction fitted to the core.
Specifikationer
- Beskrivelse:Planarcore polyvinyl alcohol brush for Lam OnTrak® 2 NH₄OH, Process platform: 200 mm, 4 per pack
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