GateKeeper® GPU Media Gas Purifiers

Entegris GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of gas purification products that deliver unsurpassed value and performance.

• Purity control below parts-per-billion (ppb) levels

• Low pressure drop through the purifier
• Long lifetime - improves cost of ownership
• Uses ambient temperature purification - no heat or power required to operate
• Insensitive to orientation (horizontal/vertical)

Applications: Semiconductor, data storage, flat panel display, LED, solar.

One year with an inlet challenge of 1 ppm moisture and 1 ppm oxygen with flow rates.

Break through indicator (BTI): Detects moisture downstream of a purifier and notifies that a replacement or regeneration is required.

 : Manufactured in an ISO® 9001:2015 facility and CE certified to the Pressure Equipment Directive (PED), Designed in accordance with ASME®.

 : Additional options includes: additional valves and piping so the process gas can bypass around the purifier, Entegris offers 3 and 5
valve bypass assemblies for many of the standard, GPU Gas Purifiers (sold separately).