Waferholdere

Waferholdere er essentielle til opbevaring eller forsendelse af wafere i forskellige størrelser, og deres holdbare polypropylenkonstruktion gør dem modstandsdygtige over for alle typer skader og kontaminering af wafere under både transport og opbevaring. Holderne fås i enkelt- eller multi-wafer-udgaver, hvor nogle modeller kan rumme en række størrelser ved justering af indbyggede silikoneunderstøtninger. Waferholdere er gennemsigtige for nem observation af wafere, der opbevares indeni.

Mask packages, H 68 series

Supplier: ENTEGRIS

For masks or reticles with pellicles. Label for identication labels. Landing pads prevent tearing of pellicies.

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Wafer carrier handles, squeeze style

Supplier: ENTEGRIS

These wafer warrier handles are designed for extended lead times apply.

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Transport wafer carriers, Spectra™FOUP

Supplier: ENTEGRIS

The Spectra™ FOUP provides clean, secure wafer transport and optimum automation integration.

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Miscellaneous device carriers A118

Supplier: ENTEGRIS

Carriers for handling miscellaneous devices.

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Wafer carriers, for 100 mm (4") wafer handling, 72/182 and 190 series

Supplier: ENTEGRIS

These 100 mm wafer carriers are designed for optimum performance in automated operations or for processing LCDs and other small devices.

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Wafer carriers, for 2,5" and smaller wafer handling

Supplier: ENTEGRIS

2" wafer carriers, Pocket spacing: 4,76 mm, pocket flat: 1,02 mm, 25 wafers, Stat-Pro® 100, —

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Wafer transport carriers, 20X series

Supplier: ENTEGRIS

High performance in a closed side wall configuration. Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today's advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers.

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Transport wafer carriers, 200 mm, 192/198 series

Supplier: ENTEGRIS

Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers.

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Mask packages, H 60 series

Supplier: ENTEGRIS

Holds one mask or reticle.

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Handles for device carriers

Supplier: ENTEGRIS

Squeeze style handles.

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Wafer baskets

Supplier: ENTEGRIS

These wafer baskets made of PFA are designed for processing and handling substrates. They are compatible with tanks and handles.

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Mask packages, H 92 series

Supplier: ENTEGRIS

Provides excellent security for masks or reticles with pellicles.

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Wafer carrier handles for 150 mm wafer handling

Supplier: ENTEGRIS

Squeeze style
Attaches to the notches on both end walls of carrier
Overall size: 163×140×183 mm
Compatible with all 'M' style carriers

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Process wafer carriers, for 150 mm wafer handling, 182/190/194 Series

Supplier: ENTEGRIS

182 Series
The industry standard 150 mm process wafer carrier. Four-point contact on the 'H' bar for improved wafer positioning. Open sidewall design to minimise liquid traps and promote even solution coverage and drainage. High profile design for maximum wafer protection.