Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

Provides excellent security for masks or reticles with pellicles.

Supplier: ENTEGRIS

E 99 Series

Supplier: ENTEGRIS

These integral ferrule fittings are made from PFA.

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

Conical pocket holds one wafer face down contacting only the wafer edges.

Supplier: ENTEGRIS

The point-of-use photochemical filters with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes. Both Optimizer® D300 and D600 filters are geared to small-volume filtration of photoresists, resist dielectrics, and solvents. It requires no pre-wetting, so the filters function immediately after installation. Without the need for prewetting, they reduce the likelihood that microbubbles will form and avoid the problems associated with incomplete wetting and the mixing of incompatible chemicals.

Supplier: ENTEGRIS

Galtek®, Cap, with hex 13/16", Length: 21,3 mm, For tubing ext.Ø: 3/8"

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

These wafer baskets made of PFA are designed for processing and handling substrates. They are compatible with tanks and handles.

Supplier: ENTEGRIS

CR4 pneumatic valves are specially designed to handle temperatures upto 160 °C. There is a option to add ¼" and ¹/₈" connections from Flaretek®. With no exposed metal hardware the valve is completely sealed and protected from harsh chemical environments.

Supplier: ENTEGRIS

Superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents.

Supplier: ENTEGRIS

Squeeze style handles.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers are designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical.

Supplier: ENTEGRIS

GateKeeper® Heated Getter Units (HGU) are ideal solutions for point-of-use purification where CH4 or N2 impurity removal is required. Gases purified include Ar, He, Xe, N2, and H2.

Supplier: ENTEGRIS

These cartridge filters are suited for acids, bases, process water, solvents, dyes and lacquers in flat panel display and chemical manufacturing.

Supplier: ENTEGRIS

SmartStack® horizontal wafer shipping system is designed to reduce wafer breakage, die bond corrosion and particle contamination. These shipping system is designed to utilize common secondary packaging across wafer sizes, and the result is reduction in the number of pacvkaging configurations and wafer packing process. With additional layer of protection it is easy to maintain wafer integrity during transport and shipping.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Allows continuous flow through parallel ports. When actuated, the sample port opens allowing fluid to flow out or in. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

Glass-filled PP, white. Straight forceps for substrate handling.

Supplier: ENTEGRIS

Advanced wafer isolation for 200 mm fabs. Trends in wafer processing technology have mandated advancements in wafer handling technology to support today's advanced semiconductor processing facilities. Advanced wafer isolation pods provide wafer isolation, and coupled with advanced wafer transport carriers, offer performance benefits over traditional wafer carriers and storage boxes. The M20X Series 200 mm Pod is a component of Silicon Delivery™ Systems and Services – Entegris's unique materials integrity management solution to cost effectively manage silicon from production to consumption.

Supplier: ENTEGRIS

Squeeze style
Attaches to the notches on both end walls of carrier
Overall size: 163×140×183 mm
Compatible with all 'M' style carriers

Supplier: ENTEGRIS

The safe and convenient method of interfacing reusable FluoroPure® chemical containers with bulk delivery systems. The patented design is key coded to assure against unsafe chemical mixing while ensuring dedicated clean service. One connection provides dispensing, venting and level detection.

Supplier: ENTEGRIS

These carriers are designed to hold masks or reticles during transport. They can be used within diverse industries, such as semi-conductor data storage, chemical processing and fuel cell. The carriers can be combined with handles and/or shipping boxes (need to be ordered separately).

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

Stainless steel/PFA manifold for use with Optimizer® ST DEV and DI photochemical filters.

Supplier: ENTEGRIS

PFA, natural.

Supplier: ENTEGRIS

Ultrapak® series multiple wafer shipping boxes are made of Ultrapure polypropylene materials that provide a clean shipping environment and assure low levels of condensable inorganics.

Supplier: ENTEGRIS

Tray covers in various standard materials are shown below.