GateKeeper® HGU Heated Getter Purifiers
Catalog # ENTEPS3-MT3-N-1
Supplier: ENTEGRIS
New Product
Specifications
- Flow rate:5 slpm
- Description:Purifier MT3 phase 1 nitrogen, 6 kg
- Height:600 mm
- Depth:100 mm
- Pk:1
- Width:250 mm
Specifications
About this item
GateKeeper® Heated Getter Units (HGU) are ideal solutions for point-of-use purification where CH4 or N2 impurity removal is required. Gases purified include Ar, He, Xe, N2, and H2.
The heated getter technology forms an irreversible bond with the impurities and removes them to sub-ppb levels. Unlike ambient purification technologies that rely on surface sorption only, heated getter technology utilizes the entire volume of material resulting in superior impurity capacity and longer purifier life.
Outlet gas temperature: <50 °C (122 °F)
Average power consumption: <50 W