Inline gas filters, Wafergard® III NF Micro
Supplier: ENTEGRIS
Certificates
About this item
The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.
- Superior particulate filtration for ultrapure gas system filtration
- Housing assembly eliminates outgassing by minimising weld area
Filter element: patented, sintered nickel membrane; housing: electropolished F20 stainless steel
Applications: ultrapure gas lines, high temperature and dynamic pressure applications, new fab construction, inert and reactive gases.
Downstream cleanliness particles: Less than 0,03 particles/liter (<1 particle/0,028 m³) greater than 0,01 μm
Downstream cleanliness volatiles : Volatile outgassing of H₂O, O₂ and THC is below detectable limits (by RGA and FID at room temperature)
Specifications
- Catalog No:
- ENTEWG3NSMSL2
- ENTEWG3NS5RR2
- Material:
- Nickel
- Nickel
- Max. differential pressure:
- Forward/reverse: 35
- Forward/reverse: 35
- Max. operating pressure:
- 207 bar @ 100 °C
- 207 bar @ 100 °C
- Leak rating:
- Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec
- Max. operating temperature:
- Inert gases: 400 °C at 35 bar
Corrosive and reactive gases 50 °C at 70 bar - Inert gases: 400 °C at 35 bar
Corrosive and reactive gases 50 °C at 70 bar
- Fitting size:
- 1/4" gasket seal
- 1/4" gasket seal
- Inlet/outlet:
- Male/male
- Male/male
- Ø×L:
- 19×50 mm
- 19×84 mm