"ENTEGRIS"
Wafer carrier handles for 125 mm (5") wafer handling
Supplier: ENTEGRIS
Squeeze style.
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Transport wafer carriers, for 150 mm wafer handling, 182/194/196 Series
Supplier: ENTEGRIS
These standard 150 mm wafer carriers feature a high rigidity and dimensional stability.
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Inline gas filters, Wafergard® GT-Plus
Supplier: ENTEGRIS
These inline gas filters are designed to removed particles from inert gases for flow rates up to 30 L/min.
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Multiple wafer shipping boxes for 76,2 mm (3") wafer handling, H 6630 series
Supplier: ENTEGRIS
Wafer handling, Multiple wafer shipping boxes for 76,2 mm (3") wafer handling, H 6630 Series, Assembly, shrink-wrapped, PP, natural
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Tube fittings, tees, FlareLock® II
Supplier: ENTEGRIS
These tube fittings are made from PFA.
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Process wafer carriers, for 150 mm wafer handling, 182/190/194 Series
Supplier: ENTEGRIS
182 Series
The industry standard 150 mm process wafer carrier. Four-point contact on the 'H' bar for improved wafer positioning. Open sidewall design to minimise liquid traps and promote even solution coverage and drainage. High profile design for maximum wafer protection.
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Single wafer shipping boxes for 200 mm wafer handling, H 93 series
Supplier: ENTEGRIS
For shipping and storage applications. Holds one wafer facedown contacting only the wafer's edges.
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Single wafer shippers, for 5" (125 mm) wafer handling, H 22 series
Supplier: ENTEGRIS
Conical pocket holds one wafer face down contacting only the edge of the wafer.
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Multiple film frame shippers
Supplier: ENTEGRIS
Multiple film frame shippers provide a safe and effective way to ship and store up to 25 wafers, or singulated die, mounted to film frames. Special applications include shipping 'diced' or thinned GaAs or GaP wafers as well as storage or shipment of wafers mounted to film frame. Replaceable top cover cushion allows for reuse of shipper. Shippers available for 300 mm, 200 mm and 150 mm film frame applications.
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Transport wafer carriers, 200 mm, 192/198 series
Supplier: ENTEGRIS
Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers.
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Tubing cutters
Supplier: ENTEGRIS
These handheld tube cutters are easy to use and provide a clean, straight cut.
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Spring boxes
Supplier: ENTEGRIS
Spring boxes, Holds twelve trays and one cover or thirteen trays, Polypropylene, natural
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Integral ferrule fittings, tees, Galtek®
Supplier: ENTEGRIS
These integral ferrule fittings are made from PFA.
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Manually operated diaphragm valves, Integra®
Supplier: ENTEGRIS
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.
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