"ENTEGRIS"

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Inserts for trays H 20 series

Supplier: ENTEGRIS

Nest between H 20 trays and/or covers.

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Nitrogen spray gun

Supplier: ENTEGRIS

Long lasting and reliable PFA nitrogen spray guns with 0,5 µm PTFE membrane for use in high purity and corrosive chemical applications.

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Single wafer shippers, H 22 series

Supplier: ENTEGRIS

Available for 1,0"; 1,5"; 2,0" and 2,5" wafers. Large area on cover provides space for labelling.

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Single wafer shipper, for 300 mm wafer handling, H 93 series

Supplier: ENTEGRIS

The H 93 single wafer shipper is designed to securely retain the wafer and minimise particle generation. Stackable with multiple closures, each shipper holds one 300 mm wafer facedown contacting only the wafer’s edges.

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Clips for 4" chip trays, H 44 Series

Supplier: ENTEGRIS

Interlocking tabs press on the center of the tray for secure contact between the tray and cover.

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Single wafer shippers, for 4" (100 mm) wafer handling, H 22/H 93 series

Supplier: ENTEGRIS

H 22 Series
Conical pocket holds one wafer facedown contacting only the wafer’s edges.

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Inline gas filters, Wafergard® II F Micro

Supplier: ENTEGRIS

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.

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Clips for 2" chip trays, H20 Series

Supplier: ENTEGRIS

Clip, One piece clip, STAT-PRO® 125, For: Tray on tray or cover on tray

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Gas filter gun, Wafergard® GN

Supplier: ENTEGRIS

This gas filter gun is designed for point-of-use filtration of compressed gas.

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Dipper basket

Supplier: ENTEGRIS

Dipper basket used to clean or etch small pieces.

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Spray guns

Supplier: ENTEGRIS

Made of high purity PFA and PTFE (all wetted parts).

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Inserts for trays H 44 series

Supplier: ENTEGRIS

Nest between H 44 trays and/or covers.

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Covers for 4" chip trays, H44

Supplier: ENTEGRIS

Tray covers in various standard materials are shown below.

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GateKeeper® GPU Media Gas Purifiers

Supplier: ENTEGRIS

Entegris GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of gas purification products that deliver unsurpassed value and performance.

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GateKeeper® GPU SP70, SP300, SP600 Gas Purifiers

Supplier: ENTEGRIS

GateKeeper® GPU purifiers are the most complete and reliable solution for point-of-use (POU) gas purification.

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Trays, Bare Die/CSP, H 44 Series

Supplier: ENTEGRIS

Entegris offers a wide selection of H 44 series 4" square trays, covers and accessories to meet your changing needs. H 20 series trays are available in various pocket sizes and depths, with or without wash holes and tweezers slots. H 44 series products offer proven reliability for handling bare die, including: