Wafer baskets
02, Wafer basket, A13, 52 wafers (13 - 28,58 mm)
Catalog # ENTEA13-01-0215
Supplier: ENTEGRIS
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Product Details & Documents
These wafer baskets made of PFA are designed for processing and handling substrates. They are compatible with tanks and handles.
Compatible tanks:
A14 baskets: E12
A15 baskets: E12, E14-10-01, E22-101
A26 baskets: E14-25-01
A47 baskets: E14-21-01, E14-25-01
Compatible handles:
A14 baskets: A01, A07, A029
A15 baskets: A01, PA01, A07, PA07, A029, PA029
A26 baskets: A01, A07, A029
A47 baskets: A01, A07, A029
Specifications
- Určeno pro:52 wafers (13 - 28,58 mm)
- Popis:Wafer basket, A13
- Sekvence:02
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