"ENTEGRIS"
Cartridge filters, Optimizer® PR 16 and PR 40
Supplier: ENTEGRIS
The UPE membrane of these filters eliminates pre-wetting, which optimises the full use of the membrane and ensures maximum flow.
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Gas purifiers, GateKeeper® GPU 70 4R
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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InVue® NT4400 Electronic Flowmeters
Supplier: ENTEGRIS
The InVue® NT4400 Electronic Flowmeter is designed for use in ultra high-purity applications in the semiconductor industry and is compatible with highly corrosive processes. The flowthrough design minimizes dead volume, reducing the possibility of process contamination. This instrument features PTFE and other high purity fluoropolymers for all wetted parts.
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Single film frame shippers
Supplier: ENTEGRIS
Film frame shippers provide a convenient, safe and ergonomic means to ship and store wafers mounted on film frames. Film frame shippers are designed to protect the frame and to prevent any contact with the wafer surface.
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GateKeeper® GPU SP70, SP300, SP600 Gas Purifiers
Supplier: ENTEGRIS
I purificatori GateKeeper® GPU sono la soluzione più completa e affidabile per la purificazione dei gas al punto di utilizzo (POU).
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Manually operated diaphragm valves, Integra®
Supplier: ENTEGRIS
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three and one-half complete turns fully opens or closes the valve for more precise control than a ¹/₄-turn valve. Slower actuation reduces water hammer affect on fluid stream. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosion chemical handling applications.
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Cartridge filters, Fluorogard® AT
Supplier: ENTEGRIS
These filters are designed to consistantly remove particles from a whide range of acids, bases and other process materials. Ideal for medium to high flow applications, they deliver a low cost of ownership (COO) as a dry device or prewet product ready for quick installation. Prewet cartridges prevent alcohol-chemical interactions, avoid potential contamination sources and minimise process downtime.
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Wafer shipping boxes, Ultrapak® series
Supplier: ENTEGRIS
Wafershield™ high purity PP
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Cartridge filter, Guardian™ HPX
Supplier: ENTEGRIS
This cartridge filter with high flow and efficient particle removal, ensures rapid particle removal in one-pass and recirculating applications. It eliminates the trace levels of ions and improves the quality of ultrapure water.
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Pneumatically operated diaphragm valves, Galtek® SG series
Supplier: ENTEGRIS
This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.
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Wafer transport carriers, 20X series
Supplier: ENTEGRIS
High performance in a closed side wall configuration. Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today's advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers.
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Trays, H 20 Series
Supplier: ENTEGRIS
Entegris offers a wide selection of H 20 series 2" square trays, covers and accessories to meet your changing needs. H 20 series trays are available in various pocket sizes and depths, with or without wash holes and tweezers slots. H 20 series products offer proven reliability for handling bare die, including:
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Disposable filters, Fluoroline™ P1000
Supplier: ENTEGRIS
High performance, disposable filters for low flow applications. These filters provide compatibility with a wide range of acids, bases and non flammable solvents at ambient temperatures.
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Fitting flaring tools, Flaretek®
Supplier: ENTEGRIS
Flaretek®, 3/4" tube flaring mandrel
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InVue® NT6520 Integrated Flow Controllers
Supplier: ENTEGRIS
Offers precise point-of-use chemical flow control and is designed for point-of-use blending and dispense applications requiring medium to high flow rates (2,5 to 40 L/min).
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Cartridge filters, ProcessGard® CR
Supplier: ENTEGRIS
These cartridge filters are widely used in chemical, electronic and semiconductor industries for liquid and gas prefiltration applications. They retain contaminants by means of a multi-stage, graded density design.



