"ENTEGRIS"
Disposable filters, Fluoroline™ P1000
Supplier: ENTEGRIS
High performance, disposable filters for low flow applications. These filters provide compatibility with a wide range of acids, bases and non flammable solvents at ambient temperatures.
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Fitting flaring tools, Flaretek®
Supplier: ENTEGRIS
Flaretek®, 3/4" tube flaring mandrel
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InVue® NT6520 Integrated Flow Controllers
Supplier: ENTEGRIS
Offers precise point-of-use chemical flow control and is designed for point-of-use blending and dispense applications requiring medium to high flow rates (2,5 to 40 L/min).
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Cartridge filters, ProcessGard® CR
Supplier: ENTEGRIS
These cartridge filters are widely used in chemical, electronic and semiconductor industries for liquid and gas prefiltration applications. They retain contaminants by means of a multi-stage, graded density design.
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Inline gas filters, Wafergard® II F Mini XL
Supplier: ENTEGRIS
Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Use them in gas panels and gas cabinets where ultrapure gas is required for wafer processing.
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Wafer storage boxes for 2,5" and smaller wafer handling, E 04 series
Supplier: ENTEGRIS
Wafer handling, Wafer storage boxes for 2,5" and smaller wafer handling, E 04 series, Polystyrene, nero
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Cartridge filters, Microgard™ UPE and UPX
Supplier: ENTEGRIS
Microgard UPE/UPX filters do not require prewetting with solvent-based photochemicals. All PE construction lowers metallic and ionic contamination that can leach from filters that are manufactured with materials such as PP and nylon.
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Inline PTFE gas filters, Wafergard® MAX
Supplier: ENTEGRIS
These filters are compatible with high purity gases as well as general nitrogen and CDA applications. Available in Bronze and Silver performance levels, they are specifically designed for high flow and low delta pressure applications and provide ultimate process protection by removing contaminants that could affect process quality.
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Savana® Semiconductor Lab Disc Disposable Filter
Supplier: ENTEGRIS
Savana® Lab Disc disposable filters have been specially designed for simple, quick and efficient filtration of liquids used in laboratory, pilot and small-scale applications.
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Pneumatically operated diaphragm valves, Integra®
Supplier: ENTEGRIS
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three-ported directional valve enables simplification of piping system design while minimising its footprint. All PFA wetted surfaces for ultrapure and corrosion resistant performance.
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Galtek® check valves
Supplier: ENTEGRIS
O-ring free design, ¹/₂ or ¹/₄" orifice.
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Manually operated diaphragm valves, Galtek® SG series
Supplier: ENTEGRIS
This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.
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Palladium Hydrogen Gas Purifiers
Supplier: ENTEGRIS
I purificatori di idrogeno al palladio microcanale Pure Gas producono idrogeno a purezza ultra elevata (99,9999999%). Tutti i purificatori utilizzano la tecnologia brevettata a membrana di palladio microcanale per rimuovere tutte le impurità fino a livelli di parti per trilione. Il purificatore compatto PS7-PD05 è ideale per applicazioni a bassa portata in università, laboratori e industria. Il purificatore di idrogeno può essere installato a valle di bombole compresse o generatori.
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Metering valves, Accuflo™
Supplier: ENTEGRIS
These components are constructed of high purity PFA and PTFE materials for wetted parts and PVDF, PEEK™ and PTFE u-cup with Viton® energizer for non wetted parts.
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Forceps
Supplier: ENTEGRIS
ETFE, white. Durable forceps for substrate handling.
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Galtek® solenoid operated diaphragm valves
Supplier: ENTEGRIS
Two- or three-way diaphragm valves, ¹/₄" orifice, normally closed.



