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Planarcore® PVA Brush

Planarcore® PVA Brush

Planarcore polyvinyl alcohol brush for Lam OnTrak® 2 NH₄OH, Process platform: 200 mm, 4 per pack
Codice catalogo ENTEPVP0L0TR4
Nome del fornitore:   ENTEGRIS
Planarcore® PVA Brush
Codice catalogo ENTEPVP0L0TR4
Nome del fornitore:  ENTEGRIS
Planarcore® PVA Brush

Planarcore polyvinyl alcohol brush for Lam OnTrak® 2 NH₄OH, Process platform: 200 mm, 4 per pack

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Product Details & Documents

Planarcore® PVA Brush is designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications.

  • High-Purity PVA
  • Molded through the core construction
  • Eliminates alignment and gapping problems, increasing system throughput
  • Close molded technology
  • Reduces downtime on tool
  • Decreases defectivity on wafer

The unique molded-through-the-core technology provides absolute adhesion of the PVA to the brush core, unlike standard PVA products that are merely friction fitted to the core.

Specifiche
  • Descrizione:
    Planarcore polyvinyl alcohol brush for Lam OnTrak® 2 NH₄OH, Process platform: 200 mm, 4 per pack
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