Specifications

Materiale:
Acciaio inossidabile 316L
Descrizione:
Gas purifier, GateKeeper® GPU 17M 12R
Modello:
17M
Purezza uscita:
<100 pptV in H₂O, O₂, CO, CO₂, <1 ppbV in sulfur compounds
Filtrazione delle particelle in uscita:
0,0015 µm
Tenuta nominale:
1×10⁻⁹ atm cc/sec
Dimensioni raccordo:
³/₄"
Filtro:
0,0015 µm
Ø×L:
152,4×1085 mm
Pressione di esercizio massima:
25,5 bar (Purifier only)
17,23 (with options)
Ingresso/uscita:
Male/male
Portata di flusso max.:
2000 slpm
Temperatura di esercizio max.:
0...65 °C
Terreni:
IX
Peso:
29,5 kg
Conf:
1

Specifications

About this item

Entegris’ GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of IX gas purification products that deliver unsurpassed value and performance.

Purity control below part-per-billion (ppb) levels
Low pressure drop through the purifier
Cost effective
Regenerable - eliminates disposal issues and costs
Long lifetime - improves cost of ownership
Safe and simple to use
Ambient temperature purification - no heat or power required to operate
Insensitive to orientation (horizontal/vertical)

Applications: Semiconductor, data storage, flat panel display, LED, solar

Certifications: Manufactured in an ISO® 9001:2015 facility. Designed in accordance with ASME®.