GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of WX and HX gas purification products that deliver unsurpassed value and performance.
- Purity control below part-per-billion (ppb) levels
- Low pressure drop through the purifier
- Cost effective
- Regenerable - eliminates disposal issues and costs
- Long lifetime - improves cost of ownership
- Safe and simple to use
- Ambient temperature purification - no heat or power required to operate
- Insensitive to orientation (horizontal/vertical)
Gases purified:
WX model - CDA, O₂, CO₂, N₂, Ar, He, Ne, Kr, Xe, H₂, D₂, NH₃, AsH₃, PH₃, GeH₄, SiH₄, N₂O, NO, CF₄, C₂H₂, (CH₃)2NH (DMA), (CH₃)2N₂H₂ (DMHz)
HX model - H₂, D₂, N₂, Ar, He, Ne, Kr, Xe, H₂/N₂, H₂/Noble gases
Applications: Semiconductor, data storage, flat panel display, LED, solar
- Catalog No:
- ENTEGPUS10MFWX12R0
- ENTEGPUS10MFHX08R2
- ENTEGPUS10MFWX12R2
- Modello:
- 10M
- 10M
- 10M
- Materiale:
- Acciaio inossidabile 316L
- Acciaio inossidabile 316L
- Acciaio inossidabile 316L
- Purezza uscita:
- <100 pptV in H₂
- <100 pptV in H₂O, O₂, CO, CO₂
- <100 pptV in H₂
- Filtrazione delle particelle in uscita:
- 0,0015 µm
- 0,0015 µm
- 0,0015 µm
- Terreni:
- WX
- HX
- WX
- Pressione di esercizio massima:
- 25,5 bar (Purifier only)
17,23 (with options) - 25,5 bar (Purifier only)
17,23 (with options) - 25,5 bar (Purifier only)
17,23 (with options)
- Tenuta nominale:
- 1×10⁻⁹ atm cc/sec
- 1×10⁻⁹ atm cc/sec
- 1×10⁻⁹ atm cc/sec
- Temperatura di esercizio max.:
- 0...65 °C
- 0...65 °C
- 0...65 °C
- Portata di flusso max.:
- 1000 slpm
- 1000 slpm
- 1000 slpm
- Dimensioni raccordo:
- ³/₄"
- ¹/₂"
- ³/₄"
- Ingresso/uscita:
- Male/male
- Male/male
- Male/male
- Filtro:
- 0,0015 µm
- 0,0015 µm
- 0,0015 µm
- Ø×L:
- 152,4×749 mm
- 152,4×737 mm
- 152,4×749 mm
- Peso:
- 21,8 kg
- 20 kg
- 21,8 kg
: VWR Collection
: MOINEAU
: VWR Collection
: VWR Collection
: VWR Collection
: HIRSCHMANN
: VWR Collection
: HAMILTON BONADUZ
: ELMA SCHMIDBAUER
: GLASWARENFABRIK KARL HECHT