Inline gas filters, Wafergard® II F Mini XL
: ENTEGRIS
Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Use them in gas panels and gas cabinets where ultrapure gas is required for wafer processing.
- Superior particulate filtration for ultrapure gas system filtration
- Low pressure drop reduces the risk of condensation in low vapour pressure gases
- Cleanroom manufactured, welded and tested
- PTFE membranes provide high efficiency filtration
Filter element: hydrophobic PTFE membrane supported by moulded PTFE PFA structure; housing: electropolished 316L stainless steel.
Applications: ozone applications (gas), gas cabinets, ultrapure gas systems, gas panels, valve manifold boxes.
Downstream cleanliness particles: Less than 0,03 particles/liter (<1 particle/0,028 m³) greater than 0,01 μm.
Downstream cleanliness volatiles: <10 ppb moisture.
- Catalog No:
- ENTEWG2F32PS1
- ENTEWG2F02RR2
- ENTEWG2F02RR4
- ENTEWG2F02PS1
- ENTEWG2F02JJ4
- Materiale:
- PTFE
- PTFE
- PTFE
- PTFE
- PTFE
- Pressione differenziale max.:
- Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C - Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C - Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C - Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C - Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C
- Pressione di esercizio massima:
- 207 bar @ 23 °C
- 207 bar @ 23 °C
- 207 bar @ 23 °C
- 207 bar @ 23 °C
- 207 bar @ 23 °C
- Tenuta nominale:
- Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec
- Temperatura di esercizio max.:
- 120 °C
- 120 °C
- 120 °C
- 120 °C
- 120 °C
- Dimensioni raccordo:
- 3/8" compression seal
- 1/4" gasket seal
- 1/2" gasket seal
- 1/4" compression seal
- 1/2" butt weld tube
- Ingresso/uscita:
- Male/male
- Male/male
- Male/male
- Male/male
- -
- Ø×L:
- 25×119 mm
- 28×127 mm
- 28×133 mm
- 25×115 mm
- 28×133 mm
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