Inline gas filters, Wafergard® II F Micro

Supplier: ENTEGRIS

Supplier: ENTEGRIS

About this item

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.

Superior particulate filtration for ultrapure gas system filtration
Low pressure drop reduces the risk of condensation in low vapour pressure gases
Cleanroom manufactured, welded and tested
PTFE membranes provide high efficiency filtration

Filter element: hydrophobic PTFE membrane supported by moulded PTFE PFA structure; housing: electropolished VAR 316L stainless steel.

Applications: ozone applications (gas), gas cabinets, ultrapure gas systems, gas panels, inside process tools.

Downstream cleanliness particles: Less than 0,03 particles/liter (<1 particle/0,028 m³) greater than 0,01 μm.

Downstream cleanliness volatiles: <10 ppb moisture.

Specifications

Catalog No:
ENTEWG2FT1SS2
ENTEWGFG01RH2
ENTEWG2FT1RF2
ENTEWG2FT1RR2
ENTEWG2FT1BW2

Materiale:
PTFE
PTFE
PTFE
PTFE

Pressione differenziale max.:
Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C
Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C
Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C
Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C

Pressione di esercizio massima:
207 bar @ 23 °C
207 bar @ 23 °C
207 bar @ 23 °C
207 bar @ 23 °C

Tenuta nominale:
Qualified: 2 x 10^-10 atm-cc/sec
Tested: 1 x 10^-9 atm-cc/sec
Qualified: 2 x 10^-10 atm-cc/sec
Tested: 1 x 10^-9 atm-cc/sec
Qualified: 2 x 10^-10 atm-cc/sec
Tested: 1 x 10^-9 atm-cc/sec
Qualified: 2 x 10^-10 atm-cc/sec
Tested: 1 x 10^-9 atm-cc/sec

Temperatura di esercizio max.:
120 °C
120 °C
120 °C
120 °C

Dimensioni raccordo:
1/4" Swagelok® seal
1/4" gasket seal
1/4" gasket seal
1/4"

Ingresso/uscita:
Male/male
Male/female
Male/male
Buttweld

Ø×L:
19×74 mm
19×89 mm
19×84 mm
19×90 mm

Specifications

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