Micro-vannes

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All PFA valve body and high purity fluoropolymer wetted components for use in high purity, highly corrosive chemical handling applications.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Higher performance with greater back (outlet) pressure capability. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Allows continuous flow through parallel ports. When actuated, the sample port opens allowing fluid to flow out or in. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

CR4 pneumatic valves are specially designed to handle temperatures upto 160 °C. There is a option to add ¼" and ¹/₈" connections from Flaretek®. With no exposed metal hardware the valve is completely sealed and protected from harsh chemical environments.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three and one-half complete turns fully opens or closes the valve for more precise control than a ¹/₄-turn valve. Slower actuation reduces water hammer affect on fluid stream. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosion chemical handling applications.

Supplier: ENTEGRIS

This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.

Supplier: ENTEGRIS

O-ring free design, ¹/₂ or ¹/₄" orifice.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Valve design allows ultrapure water to continuously bypass the diaphragm, eliminating water stagnation and bacteria formation in the valve. Manually adjustable, integral needle valve provides precise control of bypass flow.

Supplier: ENTEGRIS

Smaller than most comparable valves, ¹/₄" CR4 series valves are ideal for handling wet etch and clean process chemicals. These durable valves can handle temperatures up to 160 °C at 276 kPa.

Supplier: ENTEGRIS

This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three-ported directional valve enables simplification of piping system design while minimising its footprint. All PFA wetted surfaces for ultrapure and corrosion resistant performance.

Supplier: HAMILTON BONADUZ

HV plug valves provide an economical and flexible method of custom-building a fluid flow control system, from a simple on/off valve to a more complex multi-valve arrangement, using a combination of loop and distribution valves.

Supplier: VICI JOUR RESEARCH

These micro valves for LC and GC has a unique design of the fitting detail which allows a leak-free seal with no potential for rotor damage from overtightening.