"ENTEGRIS"
Horizontal wafer shippers, 150 mm SmartStack®
Supplier: ENTEGRIS
Horizontal wafer shipper.
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Multiple wafer shippers
Supplier: ENTEGRIS
Ultrapak® series multiple wafer shipping boxes are made of Ultrapure polypropylene materials that provide a clean shipping environment and assure low levels of condensable inorganics.
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Cartridge and disposable filters, Intercept®
Supplier: ENTEGRIS
These filters provide superior filtration for critical dilute, aqueous and low neutral pH cleaning applications at advanced technology nodes. The clean, dual capture membrane improves process performance and reduces on-wafer defects. In addition to sieving particle capture which is always active, the non sieving retention mechanisms are also active and strongest in conditions where pH is <3 and no surfactant is present.
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GateKeeper® GPU SP70, SP300, SP600 Gas Purifiers
Supplier: ENTEGRIS
GateKeeper® GPU purifiers are the most complete and reliable solution for point-of-use (POU) gas purification.
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Cartridge filter, Guardian™ HPX
Supplier: ENTEGRIS
This cartridge filter with high flow and efficient particle removal, ensures rapid particle removal in one-pass and recirculating applications. It eliminates the trace levels of ions and improves the quality of ultrapure water.
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Integral ferrule fittings, nuts and caps, Galtek®
Supplier: ENTEGRIS
Galtek®, Nut ferrule, with hex 5/8", Length: 15,7 mm, For tubing ext.Ø: 6 mm
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Mask packages, H 92 series
Supplier: ENTEGRIS
Provides excellent security for masks or reticles with pellicles.
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Tube fittings, elbows, FlareLock® II
Supplier: ENTEGRIS
These tube fittings are made from PFA.
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Cartridge filters, Optimizer® D300 and D600
Supplier: ENTEGRIS
The point-of-use photochemical filters with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes. Both Optimizer® D300 and D600 filters are geared to small-volume filtration of photoresists, resist dielectrics, and solvents. It requires no pre-wetting, so the filters function immediately after installation. Without the need for prewetting, they reduce the likelihood that microbubbles will form and avoid the problems associated with incomplete wetting and the mixing of incompatible chemicals.
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Integral ferrule fittings, ebows, Galtek®
Supplier: ENTEGRIS
These integral ferrule fittings are made from PFA.
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Wafer baskets
Supplier: ENTEGRIS
These wafer baskets made of PFA are designed for processing and handling substrates. They are compatible with tanks and handles.
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Cartridge filters, Impact® 2 V2
Supplier: ENTEGRIS
Superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents.
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Wafer carrier handles for 150 mm wafer handling
Supplier: ENTEGRIS
Squeeze style
Attaches to the notches on both end walls of carrier
Overall size: 163×140×183 mm
Compatible with all 'M' style carriers
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