"ENTEGRIS"

Supplier: ENTEGRIS

Pure Gas micro-channel palladium purifiers produce ultra-high-purity hydrogen (99,9999999%). All purifiers use patented micro-channel palladium membrane technology to remove all impurities to parts-per-trillion levels. The compact PS7-PD05 purifier is ideal for low flow rate university, laboratory, and industrial applications. The hydrogen purifier can be installed downstream of compressed cylinders or generators.

Supplier: ENTEGRIS

These components are constructed of high purity PFA and PTFE materials for wetted parts and PVDF, PEEK™ and PTFE u-cup with Viton® energizer for non wetted parts.

Supplier: ENTEGRIS

ETFE, white. Durable forceps for substrate handling.

Supplier: ENTEGRIS

Two- or three-way diaphragm valves, ¹/₄" orifice, normally closed.

Supplier: ENTEGRIS

These are compact, all-metal filters that fit in place of standard ¹/₄", ³/₈" and ¹/₂" VCR® gaskets in gas distribution systems. They protect sensitive gas components, such as mass flow controllers, regulators and valves from particle damage in applications up to 400 °C.

Supplier: ENTEGRIS

Injection molded round tank, in PFA material.

Supplier: ENTEGRIS

Injection molded rectangular tanks with dual capacity.

Supplier: ENTEGRIS

Kapton® wrap for 1/2” and 3/4” components, For: Cynergy Weld-in-Place

Supplier: ENTEGRIS

These filter disc series can be used for simple, quick and efficient filtration of fluids used in laboratory, pilot and small scale applications.

Supplier: ENTEGRIS

Made of PFA, DuPont 450.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Valve design allows ultrapure water to continuously bypass the diaphragm, eliminating water stagnation and bacteria formation in the valve. Manually adjustable, integral needle valve provides precise control of bypass flow.

Supplier: ENTEGRIS

For shipping and storage applications. Holds one wafer face down contacting only the wafer's edges. Replaceable cushions securely retain the wafer to minimise particle generation. Single latch provides secure closure and easy opening.

Supplier: ENTEGRIS

Smaller than most comparable valves, ¹/₄" CR4 series valves are ideal for handling wet etch and clean process chemicals. These durable valves can handle temperatures up to 160 °C at 276 kPa.

Supplier: ENTEGRIS

These integral ferrule fittings are made from PFA.

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.