"ENTEGRIS"

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Process wafer carriers, 200 mm

Supplier: ENTEGRIS

PFA, natural.

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Forceps

Supplier: ENTEGRIS

PP, white. Straight forceps for substrate handling.

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Pneumatically operated diaphragm valves, Integra®

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

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Multiple wafer shipping box for 125 mm (5") wafer handling, Ultrapak® series

Supplier: ENTEGRIS

Ultrapak® series multiple wafer shipping boxes are made of Ultrapure polypropylene materials that provide a clean shipping environment and assure low levels of condensable inorganics.

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Manually operated diaphragm valve, Integra®

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All PFA valve body and high purity fluoropolymer wetted components for use in high purity, highly corrosive chemical handling applications.

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NOWPak® T420 PTFE Liner Bottle Systems

Supplier: ENTEGRIS

The NOWPak® liner-based bottle system is a leading containment and dispense system that helps ensure that chemicals are protected throughout the filling, shipping and dispensing operations. The system includes a container which consists of a flexible liner inside a rigid overpack, a package closure and a variety of dispense connector options.

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GateKeeper® GPU Media Gas Purifiers

Supplier: ENTEGRIS

Entegris GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of gas purification products that deliver unsurpassed value and performance.

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Cartridge filters, Fluorogard® FP

Supplier: ENTEGRIS

These filters can be used in solvent based photochemicals without the need for prewetting steps.

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Wafer carriers, for 100 mm (4") wafer handling, 72/182 and 190 series

Supplier: ENTEGRIS

These 100 mm wafer carriers are designed for optimum performance in automated operations or for processing LCDs and other small devices.

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Wafer storage boxes for 125 mm (5") wafer handling, E 89/E 93 series

Supplier: ENTEGRIS

Two snap latches, one swing pin latch or three swing pin latches. Pin and socket hinges.

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Disposable filters, Optimizer® D PR and D PR-L

Supplier: ENTEGRIS

These filters are designed for small to mid volume POU photochemical and solvent filtration needs. They can be used for the hydrophobic filtration of photoresists, thinners and solvents.