"ENTEGRIS"

Supplier: ENTEGRIS

This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three-ported directional valve enables simplification of piping system design while minimising its footprint. All PFA wetted surfaces for ultrapure and corrosion resistant performance.

Supplier: ENTEGRIS

Pure Gas micro-channel palladium purifiers produce ultra-high-purity hydrogen (99,9999999%). All purifiers use patented micro-channel palladium membrane technology to remove all impurities to parts-per-trillion levels. The compact PS7-PD05 purifier is ideal for low flow rate university, laboratory, and industrial applications. The hydrogen purifier can be installed downstream of compressed cylinders or generators.

Supplier: ENTEGRIS

Two- or three-way diaphragm valves, ¹/₄" orifice, normally closed.

Supplier: ENTEGRIS

For shipping and storage applications. Holds one wafer face down contacting only the wafer's edges. Replaceable cushions securely retain the wafer to minimise particle generation. Single latch provides secure closure and easy opening.

Supplier: ENTEGRIS

Wafergard® SG FG series gas filters provide superior particulate filtration to maximise photovoltaic cell and display manufacturing production yields.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

Photochemical filter with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes.

Supplier: ENTEGRIS

PFA spray nozzles with NPT connections for use in applications needing chemical or DI water to be sprayed across a surface.

Supplier: ENTEGRIS

These point-of-use filters meet small to mid-volume photochemical filtration needs for positive developer and DI water applications. Both Optimizer® DEV filters (for developer applications) and Optimizer® DI filters (for DI water applications) require no pre-wetting, so the filters function immediately after installation. The design also limits the handling of hazardous chemicals during the installation and promotes a healthier workplace. Do not use either filter with aromatic hydrocarbons.

Supplier: ENTEGRIS

Made of PFA, DuPont 440.

Supplier: ENTEGRIS

Carriers for handling miscellaneous devices.

Supplier: ENTEGRIS

E 90 series

Supplier: ENTEGRIS

These wafer warrier handles are designed for extended lead times apply.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

Tray covers in various standard materials.