Inline gas filters, Wafergard® GT-Plus
: ENTEGRIS
These inline gas filters are designed to removed particles from inert gases for flow rates up to 30 L/min.
- Particle retention of >99,99% removal of all particles greater than 0,003 µm diameter
- Can be used with low air intake filter, wafer transport system and clean dry air system
Supports/housing: PFA; membrane: PTFE
Filtration area: 12 cm²
- Catalog No:
- ENTEWGFG21KP3
- ENTEWGFG21KP0
- ENTEWGFG01KP3
- ENTEWGFG01KP0
- Material:
- PTFE
- PTFE
- PTFE
- PTFE
- Max. differential pressure:
- Forward: 3,4 bar at 20 °C
Reverse: 0,3 bar at 20 °C - Forward: 3,4 bar at 20 °C
Reverse: 0,3 bar at 20 °C - Forward: 3,4 bar at 20 °C
Reverse: 0,3 bar at 20 °C - Forward: 3,4 bar at 20 °C
Reverse: 0,3 bar at 20 °C
- Max. operating pressure:
- 4,1 bar @ 20 °C
- 4,1 bar @ 20 °C
- 4,1 bar @ 20 °C
- 4,1 bar @ 20 °C
- Max. operating temperature:
- 50 °C
- 50 °C
- 50 °C
- 50 °C
- Max. flow rate:
- 30 l/min
- 30 l/min
- 30 l/min
- 30 l/min
- Fitting size:
- 1/4" compression seal
- 1/4" compression seal
- 1/8" compression seal
- 1/8" compression seal
- Filter:
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- Ø×L:
- 21,5×71,5 mm
- 21,5×71,5 mm
- 21,5×69 mm
- 21,5×69 mm
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