Point of use photochemical filters, Optimizer®

: ENTEGRIS

Point of use photochemical filters, Optimizer®

: ENTEGRIS

Liquid photochemical filters designed for developer, DI water and solvent applications in POU photolithography processes.

Advanced filtration media: optimises filtration and particle retention capabilities
UPE membrane spontaneously wets and stays wet in solvents

Membrane: Patented surface-modified hydrophilic ultra-high molecular weight polyethylene (UPE); Supports, core and sleeve: HDPE; Housing: PP

Maximum operating temperature: 40 °C

Maximum inlet pressure: 3,9 bar at 25 °C

Maximum forward/reverse pressure: 2,8 bar at 25 °C

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