GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of WX and HX gas purification products that deliver unsurpassed value and performance.

• Purity control below part-per-billion (ppb) levels
• Low pressure drop through the purifier
• Cost effective
• Regenerable - eliminates disposal issues and costs
• Long lifetime - improves cost of ownership
• Safe and simple to use
• Ambient temperature purification - no heat or power required to operate
• Insensitive to orientation (horizontal/vertical)

Gases purified:
WX model - CDA, O₂, CO₂, N₂, Ar, He, Ne, Kr, Xe, H₂, D₂, NH₃, AsH₃, PH₃, GeH₄, SiH₄, N₂O, NO, CF₄, C₂H₂, (CH₃)2NH (DMA), (CH₃)2N₂H₂ (DMHz)
HX model - H₂, D₂, N₂, Ar, He, Ne, Kr, Xe, H₂/N₂, H₂/Noble gases

Applications: Semiconductor, data storage, flat panel display, LED, solar