Pneumatically operated diaphragm valves, Integra®

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Allows continuous flow through parallel ports. When actuated, the sample port opens allowing fluid to flow out or in. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

• No external metal parts
• Unique top loading design allows for field service
• Piston shaft is encapsulated in PFA diaphragm to isolate it from corrosive fluids
• Unique body design allows for 100% cavity drainage to prevent entrapment of fluids
• Addition of Espy® sensors allows electronic monitoring of valve position

¹/₄" orifice, sampling, 3-way, position indication option.