Pneumatically operated diaphragm valves, Integra®
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three-ported directional valve enables simplification of piping system design while minimising its footprint. All PFA wetted surfaces for ultrapure and corrosion resistant performance.
- No external metal parts.
- Unique top loading design provides for easy field service
- Valve body design allows significant cavity drainage to minimize fluid entrapment
- Integrally molded Flaretek® flared tube and PureBond® fusible pipe port connection options
- Adding Espy® sensors allows for electronic monitoring of valve position
¹/₄" orifice, 3-way, position indication option.
- Bezeichnung:PVDF nut, port connection 3/8" Flaretek® flared tube
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