"ENTEGRIS"

Supplier: ENTEGRIS

Film frame shippers provide a convenient, safe and ergonomic means to ship and store wafers mounted on film frames. Film frame shippers are designed to protect the frame and to prevent any contact with the wafer surface.

Supplier: ENTEGRIS

GateKeeper® GPU purifiers are the most complete and reliable solution for point-of-use (POU) gas purification.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three and one-half complete turns fully opens or closes the valve for more precise control than a ¹/₄-turn valve. Slower actuation reduces water hammer affect on fluid stream. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosion chemical handling applications.

Supplier: ENTEGRIS

Ces filtres sont conçus pour éliminer de manière constante les particules d'une large gamme d'acides, de bases et d'autres matériaux de traitement. Parfaits pour les applications de débit moyen à élevé, ils représentent un faible coût de possession, comme un dispositif ou un produit pré-humidifié prêt pour une installation rapide. Les cartouches pré-humidifiées éliminent les interactions entre alcool et produits chimiques ainsi que les sources de contamination potentielles et minimisent les temps d'arrêt du processus.

Supplier: ENTEGRIS

Wafershield™ high purity PP

Supplier: ENTEGRIS

This cartridge filter with high flow and efficient particle removal, ensures rapid particle removal in one-pass and recirculating applications. It eliminates the trace levels of ions and improves the quality of ultrapure water.

Supplier: ENTEGRIS

This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.

Supplier: ENTEGRIS

High performance in a closed side wall configuration. Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today's advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers.

Supplier: ENTEGRIS

Galtek®, Nut ferrule, with hex 5/8", Longueur: 15,7 mm, For tubing ext.Ø: 6 mm

Supplier: ENTEGRIS

Provides excellent security for masks or reticles with pellicles.

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

The point-of-use photochemical filters with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes. Both Optimizer® D300 and D600 filters are geared to small-volume filtration of photoresists, resist dielectrics, and solvents. It requires no pre-wetting, so the filters function immediately after installation. Without the need for prewetting, they reduce the likelihood that microbubbles will form and avoid the problems associated with incomplete wetting and the mixing of incompatible chemicals.

Supplier: ENTEGRIS

These integral ferrule fittings are made from PFA.

Supplier: ENTEGRIS

Ces paniers de cachets en PFA sont conçus pour la manipulation et le traitement des substrats. Ils sont compatibles avec les bacs et les manches.

Supplier: ENTEGRIS

Rétention supérieure pour une filtration ultra-propre, au point d'utilisation, de solvants photorésistants et photochimiques.

Supplier: ENTEGRIS

Squeeze style
Attaches to the notches on both end walls of carrier
Overall size: 163×140×183 mm
Compatible with all 'M' style carriers