Supplier: ENTEGRIS

GateKeeper® Heated Getter Units (HGU) are ideal solutions for point-of-use purification where CH4 or N2 impurity removal is required. Gases purified include Ar, He, Xe, N2, and H2.

Supplier: ENTEGRIS

Provides excellent security for masks or reticles with pellicles.

Supplier: ENTEGRIS

SmartStack® horizontal wafer shipping system is designed to reduce wafer breakage, die bond corrosion and particle contamination. These shipping system is designed to utilize common secondary packaging across wafer sizes, and the result is reduction in the number of pacvkaging configurations and wafer packing process. With additional layer of protection it is easy to maintain wafer integrity during transport and shipping.

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

Galtek®, Nut ferrule, with hex 1/2", Longueur: 12,7 mm, For tubing ext.Ø: 1/16"

Supplier: ENTEGRIS

The point-of-use photochemical filters with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes. Both Optimizer® D300 and D600 filters are geared to small-volume filtration of photoresists, resist dielectrics, and solvents. It requires no pre-wetting, so the filters function immediately after installation. Without the need for prewetting, they reduce the likelihood that microbubbles will form and avoid the problems associated with incomplete wetting and the mixing of incompatible chemicals.

Supplier: ENTEGRIS

Squeeze style handles.

Supplier: ENTEGRIS

Ces paniers de cachets en PFA sont conçus pour la manipulation et le traitement des substrats. Ils sont compatibles avec les bacs et les manches.

Supplier: ENTEGRIS

E 99 Series

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Allows continuous flow through parallel ports. When actuated, the sample port opens allowing fluid to flow out or in. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

CR4 pneumatic valves are specially designed to handle temperatures upto 160 °C. There is a option to add ¼" and ¹/₈" connections from Flaretek®. With no exposed metal hardware the valve is completely sealed and protected from harsh chemical environments.

Supplier: ENTEGRIS

Ces filtres à cartouche conviennent parfaitement pour les acides, bases, eaux de traitement, solvants, colorants pour écran plat et fabrication de produits chimiques.

Supplier: ENTEGRIS

These integral ferrule fittings are made from PFA.

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

Poches coniques accueillant un wafer dont la partie inférieure est en contact uniquement avec les bords du wafer.

Supplier: ENTEGRIS

Rétention supérieure pour une filtration ultra-propre, au point d'utilisation, de solvants photorésistants et photochimiques.

Supplier: ENTEGRIS

Advanced wafer isolation for 200 mm fabs. Trends in wafer processing technology have mandated advancements in wafer handling technology to support today's advanced semiconductor processing facilities. Advanced wafer isolation pods provide wafer isolation, and coupled with advanced wafer transport carriers, offer performance benefits over traditional wafer carriers and storage boxes. The M20X Series 200 mm Pod is a component of Silicon Delivery™ Systems and Services – Entegris's unique materials integrity management solution to cost effectively manage silicon from production to consumption.

Supplier: ENTEGRIS

PP rempli de verre, blanc. Pinces droites pour la manipulation de substrats.

Supplier: ENTEGRIS

Squeeze style
Attaches to the notches on both end walls of carrier
Overall size: 163×140×183 mm
Compatible with all 'M' style carriers

Supplier: ENTEGRIS

Offers precise point-of-use chemical flow control and is designed for point-of-use blending and dispense applications requiring medium to high flow rates (2,5 to 40 L/min).

Supplier: ENTEGRIS

Entegris propose une large sélection de plateaux carrés de 2" de la série H 20, de couvercles et d'accessoires pour répondre à l'évolution de vos besoins. Les plateaux de la série H 20 sont disponibles en différentes tailles et profondeurs de poches, avec ou sans trous de lavage et fentes pour pinces. Les produits de la série H 20 offrent une fiabilité reconnue pour la manipulation des puces nues, y compris :

Supplier: ENTEGRIS

Smaller than most comparable valves, ¹/₄" CR4 series valves are ideal for handling wet etch and clean process chemicals. These durable valves can handle temperatures up to 160 °C at 276 kPa.

Supplier: ENTEGRIS

Savana® Lab Disc disposable filters have been specially designed for simple, quick and efficient filtration of liquids used in laboratory, pilot and small-scale applications.

Supplier: ENTEGRIS

Ces filtres à cartouche sont largement utilisés dans l'industrie chimique, électronique et des semi-conducteurs pour les applications de préfiltration de liquides et de gaz. Ils retiennent les contaminants grâce à une conception multi-étapes, à densité progressive.

Supplier: ENTEGRIS

Provide excellent security for masks and reticles with pellicles.

Supplier: ENTEGRIS

These components are constructed of high purity PFA and PTFE materials for wetted parts and PVDF, PEEK™ and PTFE u-cup with Viton® energizer for non wetted parts.

Supplier: ENTEGRIS

This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.

Supplier: ENTEGRIS

Microgard UPE/UPX filters do not require prewetting with solvent-based photochemicals. All PE construction lowers metallic and ionic contamination that can leach from filters that are manufactured with materials such as PP and nylon.

Supplier: ENTEGRIS

Recommandés pour les gaz inertes et réactifs, ces filtres offrent une excellente compatibilité avec toutes les classes de gaz de fabrication de semi-conducteurs. Utilisez-les dans les panneaux gaz et les armoires gaz dans lesquels un gaz ultra-pur est nécessaire pour la fabrication de wafers.

Supplier: ENTEGRIS

O-ring free design, ¹/₂ or ¹/₄" orifice.