"ENTEGRIS"

Supplier: ENTEGRIS

SmartStack® horizontal wafer shipping system is designed to reduce wafer breakage, die bond corrosion and particle contamination. These shipping system is designed to utilize common secondary packaging across wafer sizes, and the result is reduction in the number of pacvkaging configurations and wafer packing process. With additional layer of protection it is easy to maintain wafer integrity during transport and shipping.

Supplier: ENTEGRIS

GateKeeper® Heated Getter Units (HGU) are ideal solutions for point-of-use purification where CH4 or N2 impurity removal is required. Gases purified include Ar, He, Xe, N2, and H2.

Supplier: ENTEGRIS

Provides excellent security for masks or reticles with pellicles.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers are designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical.

Supplier: ENTEGRIS

Entegris offers a wide selection of H 20 series 2" square trays, covers and accessories to meet your changing needs. H 20 series trays are available in various pocket sizes and depths, with or without wash holes and tweezers slots. H 20 series products offer proven reliability for handling bare die, including:

Supplier: ENTEGRIS

High performance, disposable filters for low flow applications. These filters provide compatibility with a wide range of acids, bases and non flammable solvents at ambient temperatures.

Supplier: ENTEGRIS

Flaretek®, 3/4" tube flaring mandrel

Supplier: ENTEGRIS

Offers precise point-of-use chemical flow control and is designed for point-of-use blending and dispense applications requiring medium to high flow rates (2,5 to 40 L/min).

Supplier: ENTEGRIS

These cartridge filters are widely used in chemical, electronic and semiconductor industries for liquid and gas prefiltration applications. They retain contaminants by means of a multi-stage, graded density design.

Supplier: ENTEGRIS

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Use them in gas panels and gas cabinets where ultrapure gas is required for wafer processing.

Supplier: ENTEGRIS

Wafer handling, Wafer storage boxes for 2,5" and smaller wafer handling, E 04 series, Polystyrene, Black

Supplier: ENTEGRIS

Microgard UPE/UPX filters do not require prewetting with solvent-based photochemicals. All PE construction lowers metallic and ionic contamination that can leach from filters that are manufactured with materials such as PP and nylon.

Supplier: ENTEGRIS

These filters are compatible with high purity gases as well as general nitrogen and CDA applications. Available in Bronze and Silver performance levels, they are specifically designed for high flow and low delta pressure applications and provide ultimate process protection by removing contaminants that could affect process quality.

Supplier: ENTEGRIS

Savana® Lab Disc disposable filters have been specially designed for simple, quick and efficient filtration of liquids used in laboratory, pilot and small-scale applications.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three-ported directional valve enables simplification of piping system design while minimising its footprint. All PFA wetted surfaces for ultrapure and corrosion resistant performance.

Supplier: ENTEGRIS

O-ring free design, ¹/₂ or ¹/₄" orifice.