Supplier: ENTEGRIS

These carriers are designed to hold masks or reticles during transport. Carriers and boxes purchased as an assembly.

Supplier: ENTEGRIS

Tray covers in various standard materials are shown below.

Supplier: ENTEGRIS

Bare die/CSP tray detail, ChipSentry® (Black conductive polycarbonate)

Supplier: ENTEGRIS

To support the semiconductor industry's requirements for advanced 150 mm wafer handling, Entegris offers a variety of wafer shipping and handling solutions to safely transport silicon wafers in today's 150 mm fabs.

Supplier: ENTEGRIS

Disposable filters, Fluorogard® ATX

Supplier: ENTEGRIS

Wafer carrier handles for 76,2 mm (3") wafer handling, Squeeze, A82M, PA82M wafer carriers, PFA, Natural

Supplier: ENTEGRIS

PFA, natural.

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

These standard 125 mm wafer carriers are designed for optimum performance in automated equipment.

Supplier: ENTEGRIS

Ultrapak® series multiple wafer shipping boxes are made of Ultrapure polypropylene materials that provide a clean shipping environment and assure low levels of condensable inorganics.

Supplier: ENTEGRIS

These point-of-use filters meet small to mid-volume photochemical filtration needs for positive developer and DI water applications. Both Optimizer® DEV filters (for developer applications) and Optimizer® DI filters (for DI water applications) require no pre-wetting, so the filters function immediately after installation. The design also limits the handling of hazardous chemicals during the installation and promotes a healthier workplace. Do not use either filter with aromatic hydrocarbons.

Supplier: ENTEGRIS

PP, white. Straight forceps for substrate handling.

Supplier: ENTEGRIS

These cartridge filters provide small particle retention to ensure minimal particles remain on the water surface. High purity connections with no O-ring to avoid potential source of contamination ensuring downstream cleanliness.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.

Supplier: ENTEGRIS

These cartridge filters are constructed of PTFE pleated membranes with PP supports to provide durability and cleanliness for filtration of process fluids used in the electronics industry.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All PFA valve body and high purity fluoropolymer wetted components for use in high purity, highly corrosive chemical handling applications.

Supplier: ENTEGRIS

This process cassette is molded from STAT-PRO® 3000 and durable enough to withstand temperatures up to 120 °C. This saves process time and reduces the number of products to manage for in-lab transport. The cassette has a high-profile, rigid design with dimensional stability for maximum protection. It also has four-point contact on the 'H' bar and track, for improved positioning. It is particularly suitable for use in equipment operations on process tools and automated materials handling systems.

Supplier: ENTEGRIS

For A14 wafer basket

Supplier: ENTEGRIS

Stainless steel/PFA manifold for use with Optimizer® ST DEV and DI photochemical filters.

Supplier: ENTEGRIS

These disposable filters have been optimised for use with the IntelliGen® photochemical dispense system to deliver excellent filtration and dispense characteristics.

Supplier: ENTEGRIS

For handling solar cells or other square devices.

Supplier: ENTEGRIS

Stainless steel manifold for use with Impact® Plus disposable filters.

Supplier: ENTEGRIS

Miscellaneous mask carriers.

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

These pipe fittings are made from PFA.

Supplier: ENTEGRIS

Plastic film frame rings provide a cost-effective and light weight alternative to expensive, heavy, metal frames to handle wafers during assembly operations and can be used to store and ship finished wafers.

Supplier: ENTEGRIS

Liquid photochemical filters designed for developer, DI water and solvent applications in POU photolithography processes.

Supplier: ENTEGRIS

These tube fittings are made from PVDF, PFA or CPFA.

Supplier: ENTEGRIS

These tube fittings are made from PFA.