"ENTEGRIS"
Quick Connect System Sentry® QCII
Supplier: ENTEGRIS
The safe and convenient method of interfacing reusable FluoroPure® chemical containers with bulk delivery systems. The patented design is key coded to assure against unsafe chemical mixing while ensuring dedicated clean service. One connection provides dispensing, venting and level detection.
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Cartridge filters, Optimizer® DEV and DI
Supplier: ENTEGRIS
These point-of-use filters meet small to mid-volume photochemical filtration needs for positive developer and DI water applications. Both Optimizer® DEV filters (for developer applications) and Optimizer® DI filters (for DI water applications) require no pre-wetting, so the filters function immediately after installation. The design also limits the handling of hazardous chemicals during the installation and promotes a healthier workplace. Do not use either filter with aromatic hydrocarbons.
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Mask carriers, E-series
Supplier: ENTEGRIS
These carriers are designed to hold masks or reticles during transport. Carriers and boxes purchased as an assembly.
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Gas purifiers, GateKeeper® GPU 300 4R
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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Single wafer shipping boxes, for 150 mm wafer handling, H 22 series
Supplier: ENTEGRIS
For shipping and storage applications.
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Gas purifiers, GateKeeper® GPU 200 4R
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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Cartridge filters, Savana® PTFE
Supplier: ENTEGRIS
These cartridge filters are constructed of PTFE pleated membranes with PP supports to provide durability and cleanliness for filtration of process fluids used in the electronics industry.
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Cartridge filters, Fluoroline™ S
Supplier: ENTEGRIS
These cartridge filters provide small particle retention to ensure minimal particles remain on the water surface. High purity connections with no O-ring to avoid potential source of contamination ensuring downstream cleanliness.
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Integra® Pneumatic Valves, 12,7 mm Orifice, 3-way
Supplier: ENTEGRIS
This high purity diversion valve minimises footprint chemical applications including CMP slurry.
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Inline gas filters, Wafergard® III NF Mini and Mini XL
Supplier: ENTEGRIS
The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.
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Bare die/CSP detail
Supplier: ENTEGRIS
Bare die/CSP tray detail, ChipSentry® (Black conductive polycarbonate)
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Mask carriers, A 189 series
Supplier: ENTEGRIS
These carriers are designed to hold masks or reticles during transport. They can be used within diverse industries, such as semi-conductor data storage, chemical processing and fuel cell. The carriers can be combined with handles and/or shipping boxes (need to be ordered separately).
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Wafer carrier handles for 76,2 mm (3") wafer handling
Supplier: ENTEGRIS
Wafer carrier handles for 76,2 mm (3") wafer handling, Squeeze, A82M, PA82M wafer carriers, PFA, Natural
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Planarcore® PVA Brush
Supplier: ENTEGRIS
Planarcore® PVA Brush is designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications.



