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Quick Connect System Sentry® QCII

Supplier: ENTEGRIS

The safe and convenient method of interfacing reusable FluoroPure® chemical containers with bulk delivery systems. The patented design is key coded to assure against unsafe chemical mixing while ensuring dedicated clean service. One connection provides dispensing, venting and level detection.

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Cartridge filters, Optimizer® DEV and DI

Supplier: ENTEGRIS

These point-of-use filters meet small to mid-volume photochemical filtration needs for positive developer and DI water applications. Both Optimizer® DEV filters (for developer applications) and Optimizer® DI filters (for DI water applications) require no pre-wetting, so the filters function immediately after installation. The design also limits the handling of hazardous chemicals during the installation and promotes a healthier workplace. Do not use either filter with aromatic hydrocarbons.

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Mask carriers, E-series

Mask carriers, E-series

Supplier: ENTEGRIS

These carriers are designed to hold masks or reticles during transport. Carriers and boxes purchased as an assembly.

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Gas purifiers, GateKeeper® GPU 300 4R

Gas purifiers, GateKeeper® GPU 300 4R

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

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Single wafer shipping boxes, for 150 mm wafer handling, H 22 series

Single wafer shipping boxes, for 150 mm wafer handling, H 22 series

Supplier: ENTEGRIS

For shipping and storage applications.

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Gas purifiers, GateKeeper® GPU 200 4R

Gas purifiers, GateKeeper® GPU 200 4R

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

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Cartridge filters, Savana® PTFE

Cartridge filters, Savana® PTFE

Supplier: ENTEGRIS

These cartridge filters are constructed of PTFE pleated membranes with PP supports to provide durability and cleanliness for filtration of process fluids used in the electronics industry.

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Cartridge filters, Fluoroline™ S

Supplier: ENTEGRIS

These cartridge filters provide small particle retention to ensure minimal particles remain on the water surface. High purity connections with no O-ring to avoid potential source of contamination ensuring downstream cleanliness.

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Integra® Pneumatic Valves, 12,7 mm Orifice, 3-way

Supplier: ENTEGRIS

This high purity diversion valve minimises footprint chemical applications including CMP slurry.

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Inline gas filters, Wafergard® III NF Mini and Mini XL

Inline gas filters, Wafergard® III NF Mini and Mini XL

Supplier: ENTEGRIS

The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.

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Adapters, straight, PureBond®

Supplier: ENTEGRIS

PFA.

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Bare die/CSP detail

Bare die/CSP detail

Supplier: ENTEGRIS

Bare die/CSP tray detail, ChipSentry® (Black conductive polycarbonate)

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Mask carriers, A 189 series

Supplier: ENTEGRIS

These carriers are designed to hold masks or reticles during transport. They can be used within diverse industries, such as semi-conductor data storage, chemical processing and fuel cell. The carriers can be combined with handles and/or shipping boxes (need to be ordered separately).

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Wafer carrier handles for 76,2 mm (3") wafer handling

Supplier: ENTEGRIS

Wafer carrier handles for 76,2 mm (3") wafer handling, Squeeze, A82M, PA82M wafer carriers, PFA, Natural

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Covers for Wafer Baskets

Supplier: ENTEGRIS

For A14 wafer basket

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Planarcore® PVA Brush

Supplier: ENTEGRIS

Planarcore® PVA Brush is designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications.

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