This high purity diversion valve minimises footprint chemical applications including CMP slurry.

• All wetted parts are PFA providing chemical resistance in high purity, corrosive chemical applications
• No metals or elastomers in secondary containment area improves reliability and cleanliness

PVDF actuator components and no external metal parts means lower contamination potential in the event of a media leak or exposure to harsh external environments.

Ideal in point-of-use applications when low flow is required, including high-purity, corrosive chemical handling, low volume bulk chemical delivery, wet etch and clean (WEC) process chemicals and chemical line sizes 12,7 mm or larger.

The FlareLock II fitting design combines the gripping power of a grooved tube, the security of a locking ferrule mechanism and the compact, leak-free design of the Flaretek fitting body. The fitting body, split locking ring and nut are all PFA material. A specific FlareLock II fitting groove tool is also available.