"ENTEGRIS"

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Integral ferrule fittings, ebows, Galtek®

Supplier: ENTEGRIS

These integral ferrule fittings are made from PFA.

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Wafer baskets

Supplier: ENTEGRIS

These wafer baskets made of PFA are designed for processing and handling substrates. They are compatible with tanks and handles.

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Cartridge filters, Impact® 2 V2

Supplier: ENTEGRIS

Superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents.

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Wafer carrier handles for 150 mm wafer handling

Supplier: ENTEGRIS

Squeeze style
Attaches to the notches on both end walls of carrier
Overall size: 163×140×183 mm
Compatible with all 'M' style carriers

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Handles for device carriers

Supplier: ENTEGRIS

Squeeze style handles.

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Single wafer shippers for wafer size 76,2 (3"), 86,2 (3,25") or 90 mm

Supplier: ENTEGRIS

Conical pocket holds one wafer face down contacting only the wafer edges.

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Wafer Storage Boxes for 150 mm Wafer Handling, E 99, E 210 and HA 200 Series

Supplier: ENTEGRIS

E 99 Series

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Tube fittings, elbows, Quikgrip®

Supplier: ENTEGRIS

These tube fittings are made from PFA.

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Pneumatic valves, CG4 SG series

Supplier: ENTEGRIS

CR4 pneumatic valves are specially designed to handle temperatures upto 160 °C. There is a option to add ¼" and ¹/₈" connections from Flaretek®. With no exposed metal hardware the valve is completely sealed and protected from harsh chemical environments.

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Cartridge filters, ProcessGard® PP

Supplier: ENTEGRIS

These cartridge filters are suited for acids, bases, process water, solvents, dyes and lacquers in flat panel display and chemical manufacturing.

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Forceps

Supplier: ENTEGRIS

Glass-filled PP, white. Straight forceps for substrate handling.

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Wafer shipping system, horizontal, SmartStack®

Supplier: ENTEGRIS

SmartStack® horizontal wafer shipping system is designed to reduce wafer breakage, die bond corrosion and particle contamination. These shipping system is designed to utilize common secondary packaging across wafer sizes, and the result is reduction in the number of pacvkaging configurations and wafer packing process. With additional layer of protection it is easy to maintain wafer integrity during transport and shipping.

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GateKeeper® HGU Heated Getter Purifiers

Supplier: ENTEGRIS

GateKeeper® Heated Getter Units (HGU) are ideal solutions for point-of-use purification where CH4 or N2 impurity removal is required. Gases purified include Ar, He, Xe, N2, and H2.

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Pneumatically operated diaphragm valves, Integra®

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Allows continuous flow through parallel ports. When actuated, the sample port opens allowing fluid to flow out or in. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

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GateKeeper® GPU 20M 12, 16R Gas Purifiers

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers are designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical.

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Multiple film frame shippers

Supplier: ENTEGRIS

Multiple film frame shippers provide a safe and effective way to ship and store up to 25 wafers, or singulated die, mounted to film frames. Special applications include shipping 'diced' or thinned GaAs or GaP wafers as well as storage or shipment of wafers mounted to film frame. Replaceable top cover cushion allows for reuse of shipper. Shippers available for 300 mm, 200 mm and 150 mm film frame applications.