"ENTEGRIS"
Cartridge filter, Guardian™ HPX
Supplier: ENTEGRIS
This cartridge filter with high flow and efficient particle removal, ensures rapid particle removal in one-pass and recirculating applications. It eliminates the trace levels of ions and improves the quality of ultrapure water.
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Pneumatically operated diaphragm valves, Galtek® SG series
Supplier: ENTEGRIS
This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.
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Wafer transport carriers, 20X series
Supplier: ENTEGRIS
High performance in a closed side wall configuration. Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today's advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers.
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Trays, H 20 Series
Supplier: ENTEGRIS
Entegris offers a wide selection of H 20 series 2" square trays, covers and accessories to meet your changing needs. H 20 series trays are available in various pocket sizes and depths, with or without wash holes and tweezers slots. H 20 series products offer proven reliability for handling bare die, including:
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Disposable filters, Fluoroline™ P1000
Supplier: ENTEGRIS
High performance, disposable filters for low flow applications. These filters provide compatibility with a wide range of acids, bases and non flammable solvents at ambient temperatures.
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Fitting flaring tools, Flaretek®
Supplier: ENTEGRIS
Flaretek®, 3/4" tube flaring mandrel
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InVue® NT6520 Integrated Flow Controllers
Supplier: ENTEGRIS
Offers precise point-of-use chemical flow control and is designed for point-of-use blending and dispense applications requiring medium to high flow rates (2,5 to 40 L/min).
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Cartridge filters, ProcessGard® CR
Supplier: ENTEGRIS
These cartridge filters are widely used in chemical, electronic and semiconductor industries for liquid and gas prefiltration applications. They retain contaminants by means of a multi-stage, graded density design.
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Inline gas filters, Wafergard® II F Mini XL
Supplier: ENTEGRIS
Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Use them in gas panels and gas cabinets where ultrapure gas is required for wafer processing.
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Wafer storage boxes for 2,5" and smaller wafer handling, E 04 series
Supplier: ENTEGRIS
Wafer handling, Wafer storage boxes for 2,5" and smaller wafer handling, E 04 series, Polystyrene, Black
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Cartridge filters, Microgard™ UPE and UPX
Supplier: ENTEGRIS
Microgard UPE/UPX filters do not require prewetting with solvent-based photochemicals. All PE construction lowers metallic and ionic contamination that can leach from filters that are manufactured with materials such as PP and nylon.
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Inline PTFE gas filters, Wafergard® MAX
Supplier: ENTEGRIS
These filters are compatible with high purity gases as well as general nitrogen and CDA applications. Available in Bronze and Silver performance levels, they are specifically designed for high flow and low delta pressure applications and provide ultimate process protection by removing contaminants that could affect process quality.
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Savana® Semiconductor Lab Disc Disposable Filter
Supplier: ENTEGRIS
Savana® Lab Disc disposable filters have been specially designed for simple, quick and efficient filtration of liquids used in laboratory, pilot and small-scale applications.
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Pneumatically operated diaphragm valves, Integra®
Supplier: ENTEGRIS
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three-ported directional valve enables simplification of piping system design while minimising its footprint. All PFA wetted surfaces for ultrapure and corrosion resistant performance.
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Galtek® check valves
Supplier: ENTEGRIS
O-ring free design, ¹/₂ or ¹/₄" orifice.
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Manually operated diaphragm valves, Galtek® SG series
Supplier: ENTEGRIS
This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.
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