"ENTEGRIS"

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Disposable filters, Optimizer® DEV and DI

Supplier: ENTEGRIS

These point-of-use filters meet small to mid-volume photochemical filtration needs for positive developer and DI water applications. Both Optimizer® DEV filters (for developer applications) and Optimizer® DI filters (for DI water applications) require no pre-wetting, so the filters function immediately after installation. The design also limits the handling of hazardous chemicals during the installation and promotes a healthier workplace. Do not use either filter with aromatic hydrocarbons.

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Spray nozzles

Supplier: ENTEGRIS

PFA spray nozzles with NPT connections for use in applications needing chemical or DI water to be sprayed across a surface.

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Gas purifiers, GateKeeper® GPU 2500 4R

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

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Wafer Storage Boxes for 150 mm Wafer Handling, E 90, E 124 and E 160 Series

Supplier: ENTEGRIS

E 90 series

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Gas filters, FG series, Wafergard® SG

Supplier: ENTEGRIS

Wafergard® SG FG series gas filters provide superior particulate filtration to maximise photovoltaic cell and display manufacturing production yields.

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Covers for 2" chip trays, H20

Supplier: ENTEGRIS

Tray covers in various standard materials.

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Tubings, PFA, high purity, PureBond® 4200

Supplier: ENTEGRIS

Made of PFA, DuPont 440.

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Disposable filters, Optimizer®

Supplier: ENTEGRIS

Photochemical filter with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes.

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Pipe fittings, elbows, PureBond®

Supplier: ENTEGRIS

These pipe fittings are made from PFA.

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Trays, Bare Die/CSP, H 44 Series

Supplier: ENTEGRIS

Entegris offers a wide selection of H 44 series 4" square trays, covers and accessories to meet your changing needs. H 20 series trays are available in various pocket sizes and depths, with or without wash holes and tweezers slots. H 44 series products offer proven reliability for handling bare die, including:

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Wafer storage boxes for 76,2 mm (3") wafer handling, E 52-101 series

Supplier: ENTEGRIS

Wafer handling, Envelopes for wafer storage boxes, Envelopes, antistatic, PVC, —

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Pneumatically operated diaphragm valves, Integra®

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Higher performance with greater back (outlet) pressure capability. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

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Wafer carrier handles, squeeze style

Supplier: ENTEGRIS

These wafer warrier handles are designed for extended lead times apply.

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Transport wafer carriers, Spectra™FOUP

Supplier: ENTEGRIS

The Spectra™ FOUP provides clean, secure wafer transport and optimum automation integration.

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Inline gas filters, Wafergard® III NF Micro

Supplier: ENTEGRIS

The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.