Gasfilter, FG Serie, Wafergard® SG
: ENTEGRIS
Die Gasfilter der Wafergard® SG FG-Serie bieten eine hervorragende Partikelfiltration, um die Produktionsausbeute bei der Herstellung von Photovoltaikzellen und Displays zu maximieren.
- Kompatibel mit hochreinen Gasen, einschließlich N₂, CDA, H₂, SiH₄ und NF₃
- Hervorragende nachfolgende Sauberkeit mit einer Rückhalterate von 9 LRV bei Nenndurchfluss
Filterelement: Hydrophobe PTFE-Membran, verstärkt durch geformtes PTFE, PFA-Struktur und PFA-O-Ring; Gehäuse: elektropolierter Edelstahl 316 L
Maximaler vorwärtiger Differenzdruck: 4,14 bar bei 23 °C
Maximaler rückwärtiger Differenzdruck: 0,69 bar bei 23 °C
- Catalog No:
- ENTEYY5032PS1
- ENTEWGFGMBRR2
- ENTEWGFG50PR1
- ENTEWGFGMBSS2
- ENTEWGFG02PR1
- ENTEWGFGMBSS3
- ENTEWGFGT1PS1
- ENTEWGFGT1PR1
- ENTEYY5001HR1
- ENTEYY5032PR1
- ENTEWGFG32PS1
- ENTEWGFGMBSS4
- ENTEWGFG02PS1
- ENTEWGFGMBRR4
- ENTEYY5002PR1
- ENTEYY5001HS1
- Max. operating pressure:
- 200 bar @ 23 °C
- 40 bar @ 23 °C
- 200 bar @ 23 °C
- 40 bar @ 23 °C
- 200 bar @ 23 °C
- 40 bar @ 23 °C
- 200 bar @ 23 °C
- 200 bar @ 23 °C
- 200 bar @ 23 °C
- 200 bar @ 23 °C
- 200 bar @ 23 °C
- 40 bar @ 23 °C
- 200 bar @ 23 °C
- 40 bar @ 23 °C
- 200 bar @ 23 °C
- 200 bar @ 23 °C
- Leckraten:
- Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
- Max. Arbeitstemperatur:
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- Dichtungsgröße:
- ³/₈" compression seal
- ¹/₄" gasket seal
- ¹/₂" gasket seal
- ¹/₄" compression seal
- ¹/₄" gasket seal
- ³/₈" compression seal
- ¹/₄" compression seal
- ¹/₄" gasket seal
- ¹/₄" gasket seal
- ³/₈" gasket seal
- ³/₈" compression seal
- ¹/₂" compression seal
- ¹/₄" compression seal
- ¹/₂" gasket seal
- ¹/₄" gasket seal
- ¹/₄" compression seal
- Filter:
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- Ø×L:
- 119,3×28,5 mm
- 127×35,5 mm
- 127×28,4 mm
- 112,7×35,5 mm
- 127×28,4 mm
- 117,9×35,5 mm
- 73,7×19,05 mm
- 84,1×19,05 mm
- 84,1×19,05 mm
- 133,5×28,5 mm
- 115,5×28,4 mm
- 118,7×35,5 mm
- 115,5×28,4 mm
- 127×35,5 mm
- 127×28,5 mm
- 73,7×19,05 mm
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