Wafer carriers, for 100 mm (4") wafer handling, 72/182 and 190 series
: ENTEGRIS
These 100 mm wafer carriers are designed for optimum performance in automated operations or for processing LCDs and other small devices.
72 series
Original linear wafer carrier
Wash openings
'H' bar equipment interface
Pins and holes on top rail
Both end walls have flanges that extend to the bottom of carrier
182 series
Open sidewall style with wrap-around wash slots
Protective side wall design guards against damage from operator contact
190 series
Optimum performance in centrifugal processing applications
Low contour, open flow sidewall style
'H' bar equipment interface
Pins and holes on top rail
: Articles may not be available in all countries. Please contact your local Avantor office.
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