About this item
The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.
- Superior particulate filtration for ultrapure gas system filtration
- Housing assembly eliminates outgassing by minimising weld area
- Eliminates outgassing, improves corrosion resistance and provides excellent chemical compatibility
Filter element: patented, sintered nickel membrane; housing: electropolished VAR 316L stainless steel.
Applications: ultrapure gas lines, high temperature and dynamic pressure applications, new fab construction, inert and reactive gases.
Downstream cleanliness: <0,03 particles/liter (<1 particle/0,028 m³) >0,01 μm.
Specifications
- Catalog No:
- ENTEWG3NS2RR2
- ENTEWG3NS2RR4
- ENTEWG3NS1RR2
- Material:
- Nickel
- Nickel
- Nickel
- Max. differential pressure:
- Forward/reverse: 20
- Forward/reverse: 20
- Forward/reverse: 20
- Max. operating pressure:
- 165 bar @ 100 °C
- 165 bar @ 100 °C
- 165 bar @ 100 °C
- Leak rating:
- Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec
- Max. operating temperature:
- Inert gases: 400 °C at 83 bar
Corrosive and reactive gases 50 °C at 165 bar - Inert gases: 400 °C at 83 bar
Corrosive and reactive gases 50 °C at 165 bar - Inert gases: 400 °C at 83 bar
Corrosive and reactive gases 50 °C at 165 bar
- Fitting size:
- 1/4" gasket seal
- 1/2" gasket seal
- 1/4" gasket seal
- Inlet/outlet:
- Male/male
- Male/male
- Male/male
- Ø×L:
- 28,5×127 mm
- 28,5×133 mm
- 28,5×84 mm
Specifications
Supplier: VWR Chemicals
Supplier: VWR Chemicals
Supplier: HEATHROW
Supplier: VWR Chemicals
Supplier: VWR Collection
Supplier: Merck
Supplier: VWR Collection
Supplier: VWR Chemicals
Supplier: VWR Collection
Supplier: KIMBERLY CLARK
Supplier: VWR Collection
Supplier: VWR Collection