Spezifikationen

Material:
Edelstahl 316L
Bezeichnung:
Gas purifier, GateKeeper® GPU 17M 12R
Modell:
17M
Ausgangsreinheit:
<100 pptV in H₂O, O₂, CO, CO₂, <1 ppbV in sulfur compounds
Ausgang Partikelfiltration:
0,0015 µm
Leckraten:
1×10⁻⁹ atm cc/sec
Dichtungsgröße:
³/₄"
Filter:
0,0015 µm
Ø×L:
152,4×1085 mm
Max. operating pressure:
25,5 bar (Purifier only)
17,23 (with options)
Ein-/Auslass:
Male/male
Max. Flussrate:
2000 slpm
Max. Arbeitstemperatur:
0...65 °C
Medien:
IX
Gewicht:
29,5 kg
VE:
1

Spezifikationen

Über diesen Artikel

Entegris’ GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of IX gas purification products that deliver unsurpassed value and performance.

Purity control below part-per-billion (ppb) levels
Low pressure drop through the purifier
Cost effective
Regenerable - eliminates disposal issues and costs
Long lifetime - improves cost of ownership
Safe and simple to use
Ambient temperature purification - no heat or power required to operate
Insensitive to orientation (horizontal/vertical)

Applications: Semiconductor, data storage, flat panel display, LED, solar

Certifications: Manufactured in an ISO® 9001:2015 facility. Designed in accordance with ASME®.